Anneal Induced Changes in Amorphous Semiconductor Multilayers
نویسندگان
چکیده
منابع مشابه
Crystallization and melting in metal-semiconductor multilayers.
The amorphous-to-microcrystalline phase transition of Ge in Pb/Ge multilayer geometry has been investigated as a function of layer thicknesses with the use of high-temperature x-raydiA'raction techniques. During crystallization, the modulation structure is destroyed and the Pb texture improves. In addition, the crystallization temperature decreases with decreasing amorphous Ge thickness and inc...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1986
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-77-569